Beschaffung eines semi-automatischen Wafer-Probersystems zur elektrischen und temperaturabhängigen Charakterisierung von 200 mm Wafern inklusive Installation und Integration.

Supply, delivery, installation, commissioning and integration of a semi-automatic wafer prober system for the electrical and temperature-dependent characterization of 200 mm wafers. The system shall support DC and pulsed I-V as well as low-frequency impedance measurements up to 10 MHz and shall be integrated with the existing Keithley 4200A-SCS characterization system. The scope includes the prober, temperature-controlled chuck (-60 °C to +300 °C), six electrical Kelvin probes, optical and camera systems, control hardware and software, cabling, installation, commissioning, and operator training.

Supply, delivery, installation, commissioning and integration of a semi-automatic wafer prober system for the electrical and temperature-dependent characterization of 200 mm wafers.